Relation between Preferred Orientation and Young’s Modulus of Electroplated Nickel
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چکیده
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The Young’s modulus of an electroplated nickel (Ni) thin film suitable for microelectromechanical applications has been investigated as a function of process variables: the plating temperature and current density. It was found that the Young’s modulus is approximately 205 GPa at plating temperatures less than 60 jC, close to that of bulk Ni, but drastically drops to approximately 100 GPa at 80 ...
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ژورنال
عنوان ژورنال: Journal of the Japan Institute of Metals and Materials
سال: 1991
ISSN: 0021-4876,1880-6880
DOI: 10.2320/jinstmet1952.55.12_1368